Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

Brandt, S. and Berger, B. and Donkó, Zoltán and Derzsi, Aranka and Schuengel, E. and Koepke, M. and Schulze, J. (2019) Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4. Plasma Sources Science and Technology, 28. 095021. ISSN 0963-0252 ; ESSN: 1361-6595

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Official URL: https://doi.org/10.1088/1361-6595/ab3c7c

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
Depositing User:	Dr Aranka Derzsi
Date Deposited:	26 Sep 2019 08:51
Last Modified:	26 Sep 2019 08:51
URI:	http://real.mtak.hu/id/eprint/101385

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