Hartmann, Peter and Wang, Li and Nösges, K. and Berger, Birk and Wilczek, Sebastian and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Juhász, Zoltán and Donkó, Zoltán and Derzsi, Aranka and Eunwoo, Lee and Schulze, Julian (2020) Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 29. 075014. ISSN 0963-0252 ; ESSN: 1361-6595
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PSST_2020_Hartmann_Charged_particle_dynamics_2f_at_low_frequencies_and_high_voltages.pdf Restricted to Registered users only Download (3MB) |
Official URL: https://doi.org/10.1088/1361-6595/ab9374
Item Type: | Article |
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Subjects: | Q Science / természettudomány > QC Physics / fizika |
Depositing User: | Dr Aranka Derzsi |
Date Deposited: | 28 Sep 2020 08:06 |
Last Modified: | 28 Sep 2020 08:06 |
URI: | http://real.mtak.hu/id/eprint/114986 |
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