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In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions

Lohner, Tivadar and Németh, Attila and Zolnai, Zsolt and Kalas, Benjamin and Romanenko, Alekszej and Nguyen Quoc, Khánh and Szilágyi, Edit and Kótai, Endre and Agócs, Emil and Petrik, Péter and Fried, Miklós and Bársony, István and Gyulai, József (2021) In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions. SCIENTIFIC REPORTS, 11. ISSN 2045-2322

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 11 Jan 2021 12:02
Last Modified: 11 Jan 2021 12:02
URI: http://real.mtak.hu/id/eprint/119367

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