Vass, Máté and Derzsi, Aranka and Schulze, Julian and Donkó, Zoltán (2021) Intrasheath Electron Dynamics in Low Pressure Capacitively Coupled Plasmas. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 30 (3). pp. 1-6. ISSN 0963-0252 (print); 1361-6595 (online)
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Official URL: https://doi.org/10.1088/1361-6595/abe728
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| Depositing User: | Dr Aranka Derzsi |
| Date Deposited: | 28 Oct 2021 13:16 |
| Last Modified: | 28 Oct 2021 13:34 |
| URI: | http://real.mtak.hu/id/eprint/133114 |
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