Hegedüs, Nikolett and Balázsi, Csaba and Kolonits, Tamás and Olasz, Dániel and Sáfrán, György and Serényi, Miklós and Balázsi, Katalin (2022) Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers Under Varying Reactive Gas Conditions. MATERIALS, 15 (18). pp. 1-14. ISSN 1996-1944
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materials-15-06313.pdf Available under License Creative Commons Attribution. Download (4MB) | Preview |
Official URL: https://doi.org/10.3390/ma15186313
| Item Type: | Article |
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| Subjects: | T Technology / alkalmazott, műszaki tudományok > TP Chemical technology / vegyipar, vegyészeti technológia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 13 Sep 2022 09:14 |
| Last Modified: | 13 Sep 2022 09:14 |
| URI: | http://real.mtak.hu/id/eprint/148456 |
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