Riesz, Ferenc (2023) Modelling of the backside pattern transfer in magic mirror (Makyoh) imaging. Journal of Optics, 25 (2). ISSN ISSN 2040-8986
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Riesz_2022_J._Opt._10.1088_2040-8986_aca98c.pdf - Accepted Version Download (525kB) | Preview |
Official URL: http://doi.org/10.1088/2040-8986/aca98c
Abstract
A model of magic-mirror (Makyoh) imaging with the mirror backside relief as the input is described. The mechanical pattern transfer is modelled by a convolution approach while the optical imaging using a nonlinear geometrical optical model, more general than previous approaches. Characteristic features of the imaging is analysed and the linear approximation is examined. Diffraction effects are also treated. Characteristic features for the ancient mirror and applications in semiconductor wafer inspection are discussed.
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan |
| Depositing User: | Dr. Ferenc Riesz |
| Date Deposited: | 03 Jan 2023 12:34 |
| Last Modified: | 02 Jan 2024 00:15 |
| URI: | http://real.mtak.hu/id/eprint/155890 |
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