Battistig, Gábor and Gurbán, Sándor and Sáfrán, György and Sulyok, Attila and Németh, Attila and Zolnai, Zsolt and Menyhárd, Miklós (2016) Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing. SURFACE & COATINGS TECHNOLOGY, 302. pp. 320-326. ISSN 0257-8972
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Wafer1_s2.0_S025789721630531X_main_u.pdf Restricted to Repository staff only Download (1MB) |
Official URL: http://dx.doi.org/10.1016/j.surfcoat.2016.06.039
Item Type: | Article |
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Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 19 Oct 2016 13:39 |
Last Modified: | 19 Oct 2016 13:39 |
URI: | http://real.mtak.hu/id/eprint/41923 |
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