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Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing

Battistig, Gábor and Gurbán, Sándor and Sáfrán, György and Sulyok, Attila and Németh, Attila and Zolnai, Zsolt and Menyhárd, Miklós (2016) Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing. SURFACE & COATINGS TECHNOLOGY, 302. pp. 320-326. ISSN 0257-8972

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Item Type: Article
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 19 Oct 2016 13:39
Last Modified: 19 Oct 2016 13:39
URI: http://real.mtak.hu/id/eprint/41923

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