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Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation

Bin, Lu and Defforge, Thomas and Fodor, Bálint and Morillon, Benjamin and Alquier, Daniel (2016) Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation. Journal of Applied Physics, 119 (21). pp. 1-8. ISSN 0021-8979 (print), 1089-7550 (online)

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 11 Jan 2017 11:21
Last Modified: 01 Jan 2018 00:15
URI: http://real.mtak.hu/id/eprint/45111

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