Hartmann, P. and Reyes, J. C. and Korolov, I. and Matthews, L. S. and Hyde, T. W. (2017) Simple experiment on the sputtering rate of solids in gas discharges. Physics of Plasmas, 24. pp. 1-4. ISSN 1070-664X
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Abstract
We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| Depositing User: | Dr Peter Hartmann |
| Date Deposited: | 29 Sep 2017 11:32 |
| Last Modified: | 30 Jun 2018 23:16 |
| URI: | http://real.mtak.hu/id/eprint/64364 |
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