On the mechanics of microsystems

De Pasquale, Giorgio (2010) On the mechanics of microsystems. Pollack Periodica, 5 (1). pp. 137-149. ISSN 1788-1994

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Abstract

This work is focused on the mechanical design of MEMS (micro electromechanical systems) and to the most relevant mechanically-coupled fields of interest. The paper represents an overview on some of the research topics investigated by the author in previous studies and provides a good background for the optimization of the mechanics of microsystems. The multiphysics problem is discussed, with reference to the structural-fluidic and the electromechanical coupling and their implications on the dynamic response. The stress and/or strain gradients in the material caused by building processes are introduced, as well as the MEMS reliability related to mechanical fatigue of cyclic loaded components.

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