Nagy, G. U. L. and Lavrentiev, V. and Bányász, I. and Szilasi, S. Z. and Havranek, V. and Vosecek, V. and Huszánk, R. and Rajta, I. (2017) Compaction of polydimethylsiloxane due to nitrogen ion irradiation and its application for creating microlens arrays. THIN SOLID FILMS, 636. pp. 634-638. ISSN 0040-6090
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Official URL: https://doi.org/10.1016/j.tsf.2017.07.015
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Silicones; Polydimethylsiloxane PDMS; Nitrogen ion irradiation; Micro-probes; Micro-lens; Irradiated structures; ION MICROBEAMS; Degree of compaction; Compaction effect; Surface topography; Microoptics; Microlenses; Microchannels; IRRADIATION; ion bombardment; compaction; atomic force microscopy; POLYDIMETHYLSILOXANE; MICROPROBE; Microlens; Ion microbeam |
| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD04 Organic chemistry / szerves kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 13 Feb 2018 08:09 |
| Last Modified: | 27 Sep 2018 09:53 |
| URI: | http://real.mtak.hu/id/eprint/74322 |
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