Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Donkó, Zoltán and Derzsi, Aranka and Korolov, Ihor and Hartmann, Péter and Brandt, Steven and Schulze, Julian and Berger, Birk and Koepke, Mark and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and Gibson, Andrew and O'Connell, Deborah and Gans, Timo (2017) Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Plasma Physics and Controlled Fusion, 60. 014010. ISSN 0741-3335

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