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Seed-Layer-Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

Schilirò, Emanuela and Lo Nigro, Raffaella and Roccaforte, Fabrizio and Deretzis, Ioannis and La Magna, Antonino and Pécz, Béla (2019) Seed-Layer-Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide. ADVANCED MATERIALS INTERFACES. pp. 1-11. ISSN 2196-7350

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Item Type: Article
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 17 May 2019 08:40
Last Modified: 17 May 2019 08:40
URI: http://real.mtak.hu/id/eprint/93380

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