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Items where Author is "Schüngel, E."

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Article

Schüngel, E. and Donkó, Zoltán and Hartmann, P. and Derzsi, A. and Korolov, I. and Schulze, J. (2015) Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring. Plasma Sources Science and Technology, 24 (4). pp. 1-7. ISSN 0963-0252 ; ESSN: 1361-6595

Schüngel, E. and Brandt, S. and Donkó, Zoltán and Korolov, I. and Derzsi, A. and Schulze, J. (2015) Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas. Plasma Sources Science and Technology, 24 (4). pp. 1-19. ISSN 0963-0252 ; ESSN: 1361-6595

This list was generated on Tue Jan 21 12:08:11 2020 CET.