Hegedüs, Nikolett and Lovics, Riku and Serényi, Miklós and Zolnai, Zsolt and Petrik, Péter and Mihály, Judit and Fogarassy, Zsolt and Balázsi, Csaba and Balázsi, Katalin (2021) Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films. COATINGS, 11 (1). pp. 1-13. ISSN 2079-6412
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coatings_Hegedus.pdf Available under License Creative Commons Attribution. Download (4MB) | Preview |
Official URL: https://doi.org/10.3390/coatings11010054
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 06 Jan 2021 14:05 |
| Last Modified: | 06 Jan 2021 14:05 |
| URI: | http://real.mtak.hu/id/eprint/119229 |
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