Bin, Lu and Defforge, Thomas and Fodor, Bálint and Morillon, Benjamin and Alquier, Daniel (2016) Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation. Journal of Applied Physics, 119 (21). pp. 1-8. ISSN 0021-8979 (print), 1089-7550 (online)
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Optimized_12E4953088_u.pdf Download (1MB) | Preview |
Official URL: http://dx.doi.org/10.1063/1.4953088
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 11 Jan 2017 11:21 |
| Last Modified: | 01 Jan 2018 00:15 |
| URI: | http://real.mtak.hu/id/eprint/45111 |
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