Gurbán, Sándor and Petrik, Péter and Serényi, Miklós and Sulyok, Attila and Menyhárd, Miklós and Baradács, E. and Parditka, Bence and Cserháti, C. and Langer, G. A. and Erdélyi, Z. (2018) Electron irradiation induced amorphous SiO 2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces. SCIENTIFIC REPORTS, 8 (1). pp. 1-7. ISSN 2045-2322
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Official URL: https://doi.org/10.1038/s41598-018-20537-4
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 09 Feb 2018 08:01 |
| Last Modified: | 09 Feb 2018 08:01 |
| URI: | http://real.mtak.hu/id/eprint/74101 |
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