Optimisation of Low Dissipation Micro-hotplates – Thermo-mechanical Design and Characterisation

Bíró, Ferenc and Dücső, Csaba and Hajnal, Zoltán and Csikósné Pap, Andrea Edit and Bársony, István (2013) Optimisation of Low Dissipation Micro-hotplates – Thermo-mechanical Design and Characterisation. In: Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on. IEEE Xplore, pp. 116-121. ISBN 978-1-4799-2271-0

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Abstract

operation up to 600 oC both in static and dynamic mode. For the selection of optimum device geometry and the layer structure alternatives FEM analysis was applied. The materials considered were Si3N4, SiO2, TiO2/Pt, Al2O3 and their combination in various multilayer structures. To reduce the chip size DRIE was selected for the release of the membrane. Experimental characterization of the hotplates was carried out by various techniques; the average hotplate temperature was deduced from the resistance of the applied Pt heater and verified by micro-melting point measurements. Buckling of the membranes was tested by means of optical methods and the cumulative stress of the multilayer structure quantified by Makyoh-topography. Pulsed mode cyclic heating revealed the dynamic properties and also served for accelerated stability tests. For demonstration microheater devices with heat dissipation up to 23 oC/mW and t90 < 3ms were constructed to form the basis of combustive type gas sensors operated at elevated temperature.

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