M-line spectroscopic, spectroscopic ellipsometric and microscopic measurements of optical waveguides fabricated by MeV-energy N+ ion irradiation for telecom applications

Bányász, István and Fried, Miklós and Lohner, Tivadar and Conti, G. N. and Righini, G. C. and Pelli, S. and Zolnai, Zsolt (2013) M-line spectroscopic, spectroscopic ellipsometric and microscopic measurements of optical waveguides fabricated by MeV-energy N+ ion irradiation for telecom applications. THIN SOLID FILMS, 541. pp. 3-8. ISSN 0040-6090

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Abstract

Irradiation with N+ ions of the 1.5 - 3.5 MeV energy range was applied to optical waveguide formation. Planar and channel waveguides have been fabricated in an Er-doped tungsten-tellurite glass, and in both types of bismuth germanate (BGO) crystals: Bi4Ge3O12 (eulytine) and Bi12GeO20 (sillenite). Multi-wavelength m-line spectroscopy and spectroscopic ellipsometry were used for the characterisation of the ion beam irradiated waveguides. Planar waveguides fabricated in the Er-doped tungsten-tellurite glass using irradiation with N+ ions at 3.5 MeV worked even at the 1550 nm telecommunication wavelength. 3.5 MeV N+ ion irradiated planar waveguides in eulytine-type BGO worked up to 1550 nm and those in sillenite-type BGO worked up to 1330 nm.

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