Exploration of high-entropy alloys and metallic glasses in the Hf-Nb-Ta-Ti-V-Zr compositional library using a sputtered combinatorial layer

Wang, Ao and Pethö, László and Hegedűs, Zoltán and Wątroba, Maria and de Oliveira, Jorge and Czigány, Zsolt and Michler, Johann and Gubicza, Jenő (2026) Exploration of high-entropy alloys and metallic glasses in the Hf-Nb-Ta-Ti-V-Zr compositional library using a sputtered combinatorial layer. JOURNAL OF ALLOYS AND COMPOUNDS, 1080. ISSN 0925-8388 (In Press)

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Abstract

A Hf-Nb-Ta-Ti-V-Zr combinatorial layer was studied in order to explore different high-entropy alloys and metallic glasses in this refractory compositional library. The film with a thickness of about 2 µm was deposited on a Si single crystal wafer by magnetron sputtering. The minimum and maximum concentrations of the different elements were in the ranges of 3–7% and 26–52%, respectively. The phase composition and the microstructure as a function of the chemical composition were mapped by synchrotron X-ray diffraction and transmission electron microscopy. The mechanical performance was examined by nanoindentation for the different compositions. It was found that the majority of the studied compositions (about 80%) exhibited amorphous structures due to the large atomic size mismatch. Single phase body-centered cubic (BCC) structure developed only in the vicinity of the Ti/Ta/Nb targets while BCC matrix with ω secondary phase formed close to the Hf target. The crystalline columns in the BCC region have dome-shaped caps and exhibited chemical heterogeneities due to the shadowing effect. The highest hardness (5.9 ± 0.3 GPa) was observed in the amorphous region close to the V source due to the low atomic radius and high VEC of this element.

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