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Items where Author is "Bodermann, Brend"
Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticleAgócs, Emil and Bodermann, Brend and Burger, Sven and Dai, Gaoliang and Endres, Johannes (2015) Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9556. p. 955610. ISSN 0277-786X |
