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Items where Author is "Burger, Sven"
Group by: Item Type | No Grouping Jump to: Article | Book Section Number of items: 2. ArticleAgócs, Emil and Bodermann, Brend and Burger, Sven and Dai, Gaoliang and Endres, Johannes (2015) Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9556. p. 955610. ISSN 0277-786X Book SectionMukherjee, Deshabrato and Kalas, Benjamin and Burger, Sven and Sáfrán, György and Serényi, Miklós and Fried, Miklós and Petrik, Péter (2023) Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. In: Photonic Instrumentation Engineering X. International Society for Optics and Photonics, pp. 206-214. ISBN 9781510659612; 9781510659629 |
