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Items where Author is "Burger, Sven"
Group by: Item Type | No Grouping Jump to: Article | Book Section Number of items: 3. ArticleMukherjee, Deshabrato and Burger, Sven and Siefke, Thomas and Gour, Jeetendra and Bodermann, Bernd and Petrik, Péter (2025) Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty. ACS OMEGA, in pre. ISSN 2470-1343 Agócs, Emil and Bodermann, Brend and Burger, Sven and Dai, Gaoliang and Endres, Johannes (2015) Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9556. p. 955610. ISSN 0277-786X Book SectionMukherjee, Deshabrato and Kalas, Benjamin and Burger, Sven and Sáfrán, György and Serényi, Miklós and Fried, Miklós and Petrik, Péter (2023) Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. In: Photonic Instrumentation Engineering X. International Society for Optics and Photonics, pp. 206-214. ISBN 9781510659612; 9781510659629 |
