Items where Author is "Galizia, Bruno"

Galizia, Bruno and Fiorenza, Patrick and Bongiorno, Corrado and Pécz, Béla and Fogarassy, Zsolt (2024) Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC). MICROELECTRONIC ENGINEERING, 283. ISSN 0167-9317

Galizia, Bruno and Fiorenza, Patrick and Schilirò, Emanuela and Pécz, Béla and Fogarassy, Zsolt and Greco, Giuseppe and Saggio, Mario and Cascino, Salvatore and Lo Nigro, Raffaella and Roccaforte, Fabrizio (2024) Towards Aluminum Oxide/Aluminum Nitride Insulating Stacks on 4H-SiC by Atomic Layer Deposition. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING : FUNCTIONAL MATERIALS FOR (OPTO)ELECTRONICS, SENSORS, DETECTORS, AND GREEN ENERGY, 174. No.-108244. ISSN 1369-8001 (print); 1873-4081 (online)