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Items where Author is "Galizia, Bruno"
Group by: Item Type | No Grouping Jump to: Article Number of items: 3. ArticleGalizia, Bruno and Schilirò, Emanuela and Fiorenza, Patrick and Giannazzo, Filippo and Pécz, Béla and Fogarassy, Zsolt and Roccaforte, Fabrizio and Lo Nigro, Raffaella (2026) Insights into ALD Growth of Al-Based Dielectric Stack on 4H-SiC. NANOMATERIALS, 16 (12). No. 782. ISSN 2079-4991 Galizia, Bruno and Fiorenza, Patrick and Bongiorno, Corrado and Pécz, Béla and Fogarassy, Zsolt (2024) Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC). MICROELECTRONIC ENGINEERING, 283. ISSN 0167-9317 Galizia, Bruno and Fiorenza, Patrick and Schilirò, Emanuela and Pécz, Béla and Fogarassy, Zsolt and Greco, Giuseppe and Saggio, Mario and Cascino, Salvatore and Lo Nigro, Raffaella and Roccaforte, Fabrizio (2024) Towards Aluminum Oxide/Aluminum Nitride Insulating Stacks on 4H-SiC by Atomic Layer Deposition. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING : FUNCTIONAL MATERIALS FOR (OPTO)ELECTRONICS, SENSORS, DETECTORS, AND GREEN ENERGY, 174. No.-108244. ISSN 1369-8001 (print); 1873-4081 (online) |
