Bíró, Ferenc and Hajnal, Zoltán and Csikósné Pap, Andrea Edit and Bársony, István (2014) Multiphysics modelling of the fabrication and operation of a micro-pellistor device. In: 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014. 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014 . IEEE Computer Society, Ghent, p. 6813867. ISBN 9781479947904
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Abstract
Downsizing efforts in gas-sensing applications lead to ever smaller active elements. Integration with data processing circuitry requires the use of CMOS compatible fabrication technology, autonomous operation poses limits on energy consumption of the elements, whereas reliable catalytic detection often needs high temperatures that may otherwise be constrained by safety considerations. Under these conditions, development of active sensor elements proves to be a growing challenge for design and fabrication. © 2014 IEEE.
| Item Type: | Book Section |
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| Uncontrolled Keywords: | FABRICATION; Safety considerations; Processing circuitry; Multi-physics modelling; high temperature; Gas sensing applications; Fabrication Technologies; CMOS Compatible; Autonomous operations; Microsystems; MICROELECTRONICS; Experiments; Energy utilization; data processing |
| Subjects: | Q Science / természettudomány > Q1 Science (General) / természettudomány általában T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 10 Nov 2014 07:31 |
| Last Modified: | 15 Nov 2015 00:15 |
| URI: | http://real.mtak.hu/id/eprint/18281 |
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