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Items where Author is "Serényi, Miklós"

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Article

Gajdics, Marcell and Serényi, Miklós and Kolonits, Tamás and Sulyok, Attila and Horváth, Zsolt Endre and Pécz, Béla (2023) Reactive Sputter Deposition of Ga2O3 Thin Films Using Liquid Ga Target. COATINGS, 13. ISSN 2079-6412

Sáfrán, György and Petrik, Péter and Szász, Noémi and Olasz, Dániel and Nguyen Quang, Chinh and Serényi, Miklós (2023) Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases. MATERIALS, 16 (8). ISSN 1996-1944

Romanenko, Alekszej and Agócs, Emil and Hózer, Zoltán and Petrik, Péter and Serényi, Miklós (2022) Concordant Element of the Oxidation Kinetics - Interpretation of Ellipsometric Measurements on Zr. APPLIED SURFACE SCIENCE : A JOURNAL DEVOTED TO APPLIED PHYSICS AND CHEMISTRY OF SURFACES AND INTERFACES, 573. pp. 1-8. ISSN 0169-4332 (print); 1873-5584 (online)

Hegedüs, Nikolett and Lovics, Riku and Serényi, Miklós and Zolnai, Zsolt and Petrik, Péter and Balázsi, Csaba and Balázsi, Katalin (2022) Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling. VACUUM, 202. No.-111164. ISSN 0042-207X

Hegedüs, Nikolett and Balázsi, Csaba and Kolonits, Tamás and Olasz, Dániel and Sáfrán, György and Serényi, Miklós and Balázsi, Katalin (2022) Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers Under Varying Reactive Gas Conditions. MATERIALS, 15 (18). pp. 1-14. ISSN 1996-1944

Kalas, Benjámin and Sáfrán, György and Serényi, Miklós and Fried, Miklós and Petrik, Péter (2022) Scanning-Resonance Optical Sensing based on a Laterally Graded Plasmonic Layer – Optical Properties of Ag x Al 1 − x in the Range of x = 0 to 1. APPLIED SURFACE SCIENCE : A JOURNAL DEVOTED TO APPLIED PHYSICS AND CHEMISTRY OF SURFACES AND INTERFACES. pp. 1-38. ISSN 0169-4332 (print); 1873-5584 (online) (In Press)

Hegedüs, Nikolett and Lovics, Riku and Serényi, Miklós and Zolnai, Zsolt and Petrik, Péter and Mihály, Judit and Fogarassy, Zsolt and Balázsi, Csaba and Balázsi, Katalin (2021) Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films. COATINGS, 11 (1). pp. 1-13. ISSN 2079-6412

Kalas, Benjamin and Zolnai, Zsolt and Sáfrán, György and Serényi, Miklós and Agócs, Emil and Lohner, Tivadar and Németh, Attila and Nguyen Quoc, Khánh and Fried, Miklós and Petrik, Péter (2020) Micro-combinatorial sampling of the optical properties of hydrogenated amorphous Si_{1-x}Ge_{x} for the entire range of compositions towards a database for optoelectronics. SCIENTIFIC REPORTS. ISSN 2045-2322

Sáfrán, György and Szász, Noémi and Dobrik, Gergely and Kalas, Benjamin and Serényi, Miklós (2020) Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers. VACUUM, 182. ISSN 0042-207X

Sáfrán, György and Kalas, Benjámin and Serényi, Miklós (2019) Determination of the optical properties of a-SixGe1-X facilitated by micro-combinatory. AIP CONFERENCE PROCEEDINGS, 2186. pp. 1-4. ISSN 0094-243X (print); 1551-7616 (online)

Gurbán, Sándor and Petrik, Péter and Serényi, Miklós and Sulyok, Attila and Menyhárd, Miklós and Baradács, E. and Parditka, Bence and Cserháti, C. and Langer, G. A. and Erdélyi, Z. (2018) Electron irradiation induced amorphous SiO 2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces. SCIENTIFIC REPORTS, 8 (1). pp. 1-7. ISSN 2045-2322

Lohner, Tivadar and Kalas, Benjámin and Petrik, Péter and Zolnai, Zsolt and Serényi, Miklós and Sáfrán, György (2018) Refractive Index Variation of Magnetron-Sputtered a-Si1−xGex by “One-Sample Concept” Combinatory. APPLIED SCIENCES, 8 (5). pp. 1-7. ISSN 2076-3417

Serényi, Miklós and Frigeri, Cesare and Schiller, Róbert (2018) Vegard's-law-like dependence of the activation energy of blistering on the x composition in hydrogenated a-SixGe1-x. JOURNAL OF ALLOYS AND COMPOUNDS, 763. pp. 471-477. ISSN 0925-8388

Szívós, János and Pothorszky, Szilárd László and Soltys, Jan and Serényi, Miklós and An, Hongyu and Deák, András and Sáfrán, György (2017) CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media. APPLIED SURFACE SCIENCE. ISSN 0169-4332 (In Press)

Serényi, Miklós and Frigeri, C. and Csik, A. and Nguyen Quoc, Khánh and Németh, Attila and Zolnai, Zsolt (2017) On the mechanisms of hydrogen induced blistering in RF sputtered amorphous Ge. CRYSTENGCOMM. pp. 1-29. ISSN 1466-8033

Szívós, János and Serényi, Miklós and Pothorszky, Szilárd László and Deák, András and Vértesy, Gábor and Sáfrán, György (2017) A technique for nanopatterning diverse materials. SURFACE AND COATINGS TECHNOLOGY, 313. pp. 115-120. ISSN 0257-8972

Serényi, Miklós and Lohner, Tivadar and Sáfrán, György and Szívós, János (2016) Comparison in formation, optical properties and applicability of DC magnetron and RF sputtered aluminum oxide films. VACUUM, 128. pp. 213-218. ISSN 0042-207X

Lohner, Tivadar and Serényi, Miklós and Petrik, Péter (2016) Spectroellipsometric Characterization of Sputtered Silicon Nitride Films Using Two Different Dispersion Relations. INTERNATIONAL JOURNAL OF NEW HORIZONS IN PHYSICS, 3 (1). pp. 7-10. ISSN 2314-4564

Lohner, Tivadar and Serényi, Miklós and Szilágyi, Edit and Zolnai, Zsolt and Czigány, Zsolt and Nguyen Quoc, Khánh and Petrik, Péter and Fried, Miklós (2016) Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide. APPLIED SURFACE SCIENCE. pp. 1-30. ISSN 0169-4332

Lohner, Tivadar and Serényi, Miklós and Petrik, Péter (2015) Characterization of sputtered aluminum oxide films using spectroscopic ellipsometry. INTERNATIONAL JOURNAL OF NEW HORIZONS IN PHYSICS, 2 (1). pp. 1-4. ISSN 2314-4564

Frigeri, C. and Serényi, Miklós and Szekrényes, Zsolt and Kamarás, Katalin and Csik, Attila and Nguyen Quoc, Khánh (2015) Effect of heat treatments on the properties of hydrogenated amorphous silicon for PV and PVT applications. SOLAR ENERGY, 119. pp. 225-232. ISSN 0038-092X

Szívós, János and Gergely-Fülöp, Eszter and Serényi, Miklós and Sáfrán, György (2014) Microscopic Study of Nanostructured AlOx. IMAGING & MICROSCOPY, 16 (2). pp. 18-21. ISSN 1439-4243

Szívós, János and Serényi, Miklós and Gergely-Fülöp, Eszter and Lohner, Tivadar and Sáfrán, György (2014) Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers. VACUUM, 109. pp. 200-205. ISSN 0042-207X

Frigeri, C. and Serényi, Miklós and Csik, Attila and Szekrényes, Zsolt and Kamarás, Katalin and Nasi, L. and Khánh, Nguyen Quoc (2013) Evolution of the structure and hydrogen bonding configuration in annealed hydrogenated a-Si/a-Ge multilayers and layers. APPLIED SURFACE SCIENCE, 269. pp. 12-16. ISSN 0169-4332

Frigeri, C. and Serényi, Miklós and Khánh, Nguyen Quoc and Csík, Attila and Nasi, L. and Erdélyi, Z. and Beke, Dezső and Boyen, H -G (2013) Hydrogen behaviour in amorphous Si/Ge nano-structures after annealing. APPLIED SURFACE SCIENCE, 267. pp. 30-34. ISSN 0169-4332

Serényi, Miklós and Frigeri, Cesare and Szekrényes, Zsolt and Kamarás, Katalin and Nasi, Lucia and Csik, Attila and Khánh, Nguyen Quoc (2013) On the formation of blisters in annealed hydrogenated a-Si layers. NANOSCALE RESEARCH LETTERS, 8 (84). pp. 1-7. ISSN 1931-7573

Serényi, Miklós and Csik, Attila (2013) Hidrogéntartalmú amorf szilícium/germánium multiréteg strukturális stabilitása - I. rész. FIZIKAI SZEMLE, LXIII (6). pp. 194-197. ISSN 0015-3257

Frigeri, C. and Serényi, Miklós and Csik, Attila and Erdélyi, Zoltán and Beke, Dezső (2009) AFM and TEM study of hydrogenated sputtered Si/Ge multilayers. SUPERLATTICES AND MICROSTRUCTURES, 45 (4-5). pp. 475-481. ISSN 0749-6036

Serényi, Miklós and Lohner, Tivadar and Petrik, Péter and Zolnai, Zsolt and Horváth, Zsolt Endre and Nguyen Quoc, Khánh (2008) Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction. THIN SOLID FILMS, 516 (22). pp. 8096-8100. ISSN 0040-6090

Lohner, Tivadar and Serényi, Miklós and Basa, D.K. and Nguyen Quoc, Khánh and Nemcsics, Ákos and Petrik, Péter and Turmezei, Péter (2008) Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films. ACTA POLYTECHNICA HUNGARICA, 5 (2). pp. 23-30. ISSN 1785-8860

Frigeri, C. and Serényi, Miklós and Csík, Attila and Erdélyi, Zoltán and Beke, Dezső and Nasi, L. (2008) Structural modifications induced in hydrogenated amorphous Si/Ge multilayers by heat treatments. Journal of Materials Science: Materials in Electronics, 19 (S1). pp. 289-293. ISSN 0957-4522

Serényi, Miklós and Lohner, Tivadar and Petrik, Péter and Frigeri, C. (2007) Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy. Thin Solid Films, 515 (7-8). pp. 3559-3562. ISSN 0040-6090

Horváth, Zsolt József and Serényi, Miklós and Ádám, Antalné and Szabó, I. and Badalján, Edvard and Rakovics, Vilmos (2003) Al/a-SiGe:H/c-Si m-i-p diodes - a new type of heterodevice. PHYSICA STATUS SOLIDI C-CONFERENCES AND CRITICAL REVIEWS, 00 (3). pp. 1066-1069. ISSN 1610-1634

Voros, Z. and Serényi, Miklós (2003) CW-measurements of common cavity semiconductor lasers. JAPANESE JOURNAL OF APPLIED PHYSICS, 42 (8). pp. 5056-5058. ISSN 0021-4922

Serényi, Miklós and Betko, J. and Nemcsics, Ákos and Nguyen Quoc, Khánh and Morvic, M. (2003) Fabrication of a-SiGe Structure by RF Sputtering for Solar Cell Purposes. PHYSICA STATUS SOLIDI C-CONFERENCES AND CRITICAL REVIEWS, 00 (3). pp. 857-861. ISSN 1610-1634

Horváth, Zsolt József and Ádám, Antalné and Szabo, I. and Serényi, Miklós and Vo Van, Tuyen (2002) Modification of Al/Si interface and Schottky barrier height with chemical treatment. APPLIED SURFACE SCIENCE, 190 (1-4). pp. 441-444. ISSN 0169-4332

Serényi, Miklós and Rácz, Miklós and Lohner, Tivadar (2001) Refractive index of sputtered silicon oxynitride layers for antireflection coating. VACUUM, 61 (2-4). pp. 245-249. ISSN 0042-207X

Kuhl, J. and Serényi, Miklós and Gobel, E. O. (1987) BANDWIDTH-LIMITED PICOSECOND PULSE GENERATION IN AN ACTIVELY MODE-LOCKED GAAS-LASER WITH INTRACAVITY CHIRP COMPENSATION. OPTICS LETTERS, 12 (5). pp. 334-336. ISSN 0146-9592

Book Section

Mukherjee, Deshabrato and Kalas, Benjamin and Burger, Sven and Sáfrán, György and Serényi, Miklós and Fried, Miklós and Petrik, Péter (2023) Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. In: Photonic Instrumentation Engineering X. International Society for Optics and Photonics, pp. 206-214. ISBN 9781510659612; 9781510659629

Szívós, János and Serényi, Miklós and Gergely-Fülöp, Eszter and Sáfrán, György (2015) Fabrication of Nanopatterns in a-AlOx Thin Films by a Single Laser Pulse. In: Materials Science, Testing and Informatics VII. Materials Science Forum (812). Trans Tech Publications, Zürich, pp. 259-264. ISBN 978-3-03835-389-8

Szívós, János and Serényi, Miklós and Gergely-Fülöp, Eszter and Lohner, Tivadar and Sáfrán, György (2015) UV LASER NANOPATTERNING OF Pt THIN FILMS. In: 12th Multinational Congress on Microscopy. Akadémiai Kiadó, Budapest, pp. 478-479. ISBN 978-963-05-9653-4

Frigeri, C. and Nasi, L. and Serényi, Miklós and Khánh, Nguyen Quoc and Szekrényes, Zsolt and Kamarás, Katalin and Csik, Attila (2013) From nano voids to blisters in hydrogenated amorphous silicon. In: PROCEEDINGS OF INTERNATIONAL CONFERENCE NANOMEETING-2013: PHYSICS,CHEMISTRYAND APPLICATIONS OF NANOSTRUCTURES. World Scientific, Singapore, pp. 176-179. ISBN 978-981-4460-17-0

Monograph

Pintér, János and Marton, Lajos Csaba and Pál, Magda and Rácz, Miklós and Serényi, Miklós and Szigeti, Zoltán and Tóth, Zoltán and Veisz, Ottó Bálint (2008) Az UV-B sugárzás hatása a kukorica fejlődésére = Effect of UV-B radiation on maize development. Project Report. OTKA.

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